Reflectivity of W/Si multilayer at the photo-energies of 700 eV and 1200 eV

Authors
Feng, SM Zhu, GL Shao, JD Yi, K Fan, ZX
Citation
Sm. Feng et al., Reflectivity of W/Si multilayer at the photo-energies of 700 eV and 1200 eV, CHIN PHYS L, 18(11), 2001, pp. 1481-1482
Citations number
9
Categorie Soggetti
Physics
Journal title
CHINESE PHYSICS LETTERS
ISSN journal
0256307X → ACNP
Volume
18
Issue
11
Year of publication
2001
Pages
1481 - 1482
Database
ISI
SICI code
0256-307X(200111)18:11<1481:ROWMAT>2.0.ZU;2-S
Abstract
We have deposited W/Si multilayer mirrors using magnetron sputtering, and m easured their reflectivity at the Beijing Synchrotron Radiation Facility. T he W/Si multilayer mirrors show a peak reflectivity of approximately 10% at a photo-energy of 1200 eV and 10.5% at a photo-energy of 700 eV at an inci dence angle of 81 degrees. So far, no higher reflectivity than that given i n this letter has been reported.