Low concentrations of three distinct impurity species beneath the Pd(111) s
urface are studied by STM. The subsurface impurities are distinguished by t
heir image contrast, diffusion properties, and interactions with adsorbed m
olecules. Isolated subsurface impurities appear at low gap resistance (less
than or similar to5 M Omega) as three-fold symmetric modulations of the Pd
1x1 surface corrugation. One impurity type is found to occupy substitution
al sites in the layer below the surface. Based on Auger spectroscopy this s
pecies is identified as sulfur. The other two species are found to occupy o
ctahedral interstitial sites immediately below the surface layer. Two-dimen
sional diffusion of the interstitial impurities occurs below room temperatu
re. The onset temperature for diffusion is lowered dramatically in the pres
ence of surface adsorbates. Quantitative measures of the diffusion barriers
are consistent with surface facilitated diffusion of interstitial oxygen a
nd carbon atoms. The mobile impurities interact with adsorbed atoms and mol
ecules, limiting surface diffusion, nucleating island growth, and serving a
s active sites for surface reactions. (C) 2001 American Institute of Physic
s.