Microstructures and soft magnetic properties of as-deposited Fe-Sm-O thin films

The influences of O-2 partial pressure on saturation magnetization, coerciv ity and effective permeability of the as-deposited Fe-Sm-O thin films, whic h were fabricated by RF magnetron reactive sputtering method, were investig ated. The nanocrystalline Fe-83 4Sm3.4O13.2 thin film fabricated at O-2 par tial pressure of 5% exhibited the best magnetic softness with a saturation magnetization of 1.43 MA/m, coercivity of 65.2 A/m and effective permeabili ty of about 2600 in the frequency range from 0.5 to 100 MHz. The electrical resistivity of Fe-83 4Sm3.4O13.2 was 13 mu Omega cm. The microstructures a nd electrical resistivity were investigated in this work. (C) 2001 Elsevier Science B.V. All rights reserved.