Effect of material properties on integration damage in organosilicate glass films

Authors
Ryan, ET Martin, J Junker, K Wetzel, J Gidley, DW Sun, JN
Citation
Et. Ryan et al., Effect of material properties on integration damage in organosilicate glass films, J MATER RES, 16(12), 2001, pp. 3335-3338
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF MATERIALS RESEARCH
ISSN journal
08842914 → ACNP
Volume
16
Issue
12
Year of publication
2001
Pages
3335 - 3338
Database
ISI
SICI code
0884-2914(200112)16:12<3335:EOMPOI>2.0.ZU;2-F