Determination of optical constants of Si/ZnO polycrystalline nanocomposites by spectroscopic ellipsometry

The optical constants of Si/ZnO composite Films grown on quartz glass subst rates were determined in the spectral range 1.5-5.0 eV by spectroscopic ell ipsometry using a rotating-analyzer ellipsometer. The structure of the samp le,,, was modeled by a two-phase (substrate-film) model, and the optical fu nctions of the film were parameterized through different effective medium a pproximations. The results allowed us to estimate the microstructural film parameters, such as film thickness, the volume fractions of each of the con stituents, and optical constants.