Hybrid holographic microscope for interferometric measurement of microstructures

A hybrid holographic microscope is proposed to realize both imaging and int erferometric measurement of microstructures and meet the two major challeng es in micromeasurement, which are high resolution and small object size. Th e system is developed based on an in-line digital holographic arrangement i ncorporated with a long-distance microscope. Studies demonstrate that it is capable of realizing measurement of microstructures with lateral dimension s of at least 5 mum. The application of the system in micromeasurement is e xperimentally investigated on a microcantilever. The load-induced deflectio n is obtained and validated with numerically simulated results based on a f inite element model. Error analysis for displacement determination is perfo rmed. (C) 2001 Society of Photo-Optical Instrumentation Engineers.