Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery

Authors
Dubois, A Vabre, L Boccara, AC
Citation
A. Dubois et al., Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery, OPTICS LETT, 26(23), 2001, pp. 1873-1875
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICS LETTERS
ISSN journal
01469592 → ACNP
Volume
26
Issue
23
Year of publication
2001
Pages
1873 - 1875
Database
ISI
SICI code
0146-9592(200112)26:23<1873:SPIMFH>2.0.ZU;2-O
Abstract
We describe an interference microscope that produces topographic images wit h a minimum acquisition time of 20 ms. The system is based on phase-shiftin g interferometry with sinusoidal phase modulation induced by the oscillatio n of an interferometric objective (Michelson or Mirau). A CCD camera captur es four images per oscillation period to produce a phase map in real time. The system is installed on a commercial microscope. (C) 2001 Optical Societ y of America.