As-doped GaN films have been grown by plasma-assisted molecular beam epitax
y and their properties investigated using atomic force microscopy, X-ray di
ffraction and photoluminescence (PL) spectroscopy. The structural propertie
s of the As-doped GaN films improve with increasing sample thickness. The r
oom temperature PL is dominated by a strong blue emission band, exhibiting
multiple peaks centered at 2.6 eV. The number of peaks increases monotonica
lly with sample thickness. From this we conclude that the multiple peaks in
the blue emission band of As-doped GaN samples arise mainly from optical i
nterference effects. However, the possibility of several transitions involv
ing As being responsible for the blue emission process cannot be excluded.