We have investigated the temperature dependence of the transition from sing
le phase films of GaN1-xAsx to phase separated layers. which show regions o
f hexagonal [0001] oriented GaN. cubic [111] oriented GaAs and hexagonal [0
001] oriented GaN1-xAsx. We see a strong temperature dependence of the arse
nic flux at which GaAs inclusions are first observed. Finally the intensity
of blue emission observed in As-doped GaN samples decreases strongly with
decreasing growth temperature.