By means of kinetic Monte Carlo simulations of the self-organized growth of
quantum dots in strained semiconductor systems we resolve the seemingly co
ntradictory features of kinetic versus thermodynamic behavior, e.g., with r
espect to the temperature dependence of the average dot size and their disp
ersion. We show that the size distribution immediately after deposition is
kinetically controlled, with smaller islands for lower temperatures and lar
ger islands for higher temperatures. For longer simulation times the kineti
cs leads to equilibration, and a crossover effect between the size distribu
tions occurs, which is in good agreement with the predictions of thermodyna
mics.