Citation
Ff. Chen et al., Design and performance of distributed helicon sources, PLASMA SOUR, 10(2), 2001, pp. 236-249
Citations number
21
Categorie Soggetti
Physics
Journal title
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN journal
09630252
→ ACNP
Volume
10
Issue
2
Year of publication
2001
Pages
236 - 249
Database
ISI
SICI code
0963-0252(200105)10:2<236:DAPODH>2.0.ZU;2-H
Abstract
Helicon plasma sources are known to be efficient generators of high-density
plasma for materials processing applications. By using multiple sources, a
rbitrarily large substrates can in principle be covered uniformly with dens
e plasma. To test this idea, a seven-tube helicon source was constructed, a
nd the plasma density and uniformity measured. Densities up to 10(12) cm(-3
) over a 40 cm diameter area with +/-3% uniformity were achieved.