Transparent electrodes that are used in amorphous silicon solar cells are t
extured to provide light scattering. We studied the light scattering behavi
or in transmission and reflection and found that in order to describe the m
easured spectra thickness variations of 50-60 nm over several micrometers h
ave to be assumed. This is in qualitative agreement with measured rms rough
nesses as determined with atomic force microscopy (AFM). It is important to
include these thickness variations in the modeling of amorphous silicon so
lar cells. The wavelength dependence of the light scattering in transmissio
n at the TCO-air interface was found to be lambda (-3) for light incident f
rom both sides. Scattering of the weakly absorbed long wavelength light at
the back contact is therefore essential in order to obtain high solar cell
efficiencies. (C) 2001 Elsevier Science B.V. All rights reserved.