Thermodynamic approach to germination and crystal morphology - Effect of texture in thin film deposition - Application to chemical vapor deposition of diamond crystals
S. Barrat, Thermodynamic approach to germination and crystal morphology - Effect of texture in thin film deposition - Application to chemical vapor deposition of diamond crystals, VIDE, 56(300), 2001, pp. 320
Following a rapid introduction about the capillary theory of nucleation, th
e notions of surface free energy of chemisorbed facets, equilibrium crystal
shape and wettability will be developed in the specific case of diamond cr
ystals deposited by plasma assisted chemical vapor deposition. From only ge
ometrical considerations, we will describe the formation and development of
a fiber axis during diamond film thickening obtained by growth and coalesc
ence of individual well-shaped diamond crystals. This approach will be quan
tified by developing three-dimensional simulations.