Thermodynamic approach to germination and crystal morphology - Effect of texture in thin film deposition - Application to chemical vapor deposition of diamond crystals

Authors
Citation
S. Barrat, Thermodynamic approach to germination and crystal morphology - Effect of texture in thin film deposition - Application to chemical vapor deposition of diamond crystals, VIDE, 56(300), 2001, pp. 320
Citations number
34
Categorie Soggetti
Material Science & Engineering
Journal title
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS
ISSN journal
12660167 → ACNP
Volume
56
Issue
300
Year of publication
2001
Database
ISI
SICI code
1266-0167(2001)56:300<320:TATGAC>2.0.ZU;2-A
Abstract
Following a rapid introduction about the capillary theory of nucleation, th e notions of surface free energy of chemisorbed facets, equilibrium crystal shape and wettability will be developed in the specific case of diamond cr ystals deposited by plasma assisted chemical vapor deposition. From only ge ometrical considerations, we will describe the formation and development of a fiber axis during diamond film thickening obtained by growth and coalesc ence of individual well-shaped diamond crystals. This approach will be quan tified by developing three-dimensional simulations.