Citation
P. Pigeat et al., Synthesis of diamond films: Control in situ by emission interferometry, VIDE, 56(300), 2001, pp. 346
Citations number
47
Categorie Soggetti
Material Science & Engineering
Journal title
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS
ISSN journal
12660167
→ ACNP
Volume
56
Issue
300
Year of publication
2001
Database
ISI
SICI code
1266-0167(2001)56:300<346:SODFCI>2.0.ZU;2-U
Abstract
The understanding of the physiochemical processes occurring during diamond
synthesis, as well as the films properties monitoring, require growth inves
tigation techniques. This paper deals with the historical development and t
he theoretical fundamentals of the emission interferometry which is a real
time in situ measurement of the thermal radiation emitted from a body. Simu
lated and experimental examples of diamond growth on silicon substrates are
presented in order to illustrate the potentialities of this technique.