A versatile method to characterize the mechanical and opticla properties of nano-and micro-structured CVD-diamond : Brillouin microscopy

The tremendously fast evolution in the field of chemical vapor deposited (C VD) materials requires new or improved investigation methods for the charac terization of these materials. The optical and in particular the mechanical properties of CVD samples are of great technical interest especially for h ard materials like CVD diamond. In this paper we will show the versatility of high performance Brillouin spectroscopy in investigating these materials . In addition, a new scattering technique (RIQA) to measure the distributio n of internal residual stresses in CVD diamond contact-less and non-destruc tive by using p-Brillouin spectroscopy (mu -BS) is introduced. Comparisons with other methods Like AFM, Raman scattering and optical microscopy lead t o a comprehensive picture of the mechanical and optical properties of CVD d iamond.