CVD diamond for surface acoustic wave devices

The operation frequency of surface acoustic wave (SAW) devices can be incre ased by using a layered structures (piezoelectric film on high acoustic vel ocity substrate). CVD diamond, due to its remarkable properties and especia lly its large acoustic velocity, offer much attraction as a substrate for t he SAW devices. A variety of layered structures with a CVD diamond film such as ZnO/Diamond or AlN/Diamond are investigated and a review of theoretical and experiment al results obtained on these structures and there characteristics are prese nted.