The ionization and dissociative ionization of NF3 by electron impact has be
en measured by Fourier transform mass spectrometry (FTMS). The total ioniza
tion cross-section rises to a maximum value of 2.4 +/- 0.4 x 10(-16) cm(2)
at 140 eV. Estimates of the total single ionization cross-section using ab
initio energies with the binary encounter Bethe (BEB) [Y.K. Kim, M.E. Rudd,
Phys. Rev. A 50 (1994) 3594] or Deutsch-Mark [Int. J. Mass Spec. 197 (2000
) 37] models are roughly twice the measured values. The partial cross-secti
ons creating NFx+ (x = 0, 1, 2, 3), F+, and NFx2+ (x = 1, 2, 3) are reporte
d. Differences between the FTMS results and quadrupole data and fast atom b
eam results of Tarnovsky et al. [Int. J. Mass Spectrom. Ion Processes 133 (
1994) 175] are discussed. (C) 2001 Published by Elsevier Science B.V.