System identification of a MEMS gyroscope

This paper reports the experimental system identification of the Jet Propul sion Laboratory MEMS vibratory rate gyroscope. A primary objective is to es timate the orientation of the stiffness matrix principal awes for important sensor dynamic modes with respect to the electrode pick-offs in the sensor An adaptive lattice filter is initially used to identify a high-order two- input/two-output transfer function describing the input/output dynamics of the sensor. A three-mode model is then developed from the identified input/ output model to determine the axes' orientation. The identified model, whic h is extracted from only two seconds of input/output data, also yields the frequency split between the sensor's modes that are exploited in detecting the rotation rate. The principal axes' orientation and frequency split give direct insight into the source of quadrature measurement error that corrup ts detection of the sensor's angular rate.