Design and testing of a mesoscale piezoelectric inchworm actuator with microridges

Design and testing of a mesoscale actuator device is presented in this pape r. The device uses frequency rectification concepts to amplify the displace ments while retaining comparable force outputs to current piezoelectric act uators. The design is based on an inchworm motor with the exception that mi croridges are used in the clamping system. A FEM model is used to design a device that produces a peak to peak amplitude of 900 N at 11 mm/sec with a weight of 100 g (i.e., specific power of 99 W/kg). Experimental data for pi ezoelectric stacks and adhesives are used in the design analysis. A prototy pe device is fabricated and tested with excellent agreement between analysi s and testing results. Stress and modal analysis are used to demonstrate th at the device has an infinite fatigue life and a first modal frequency at 1 777 Hz.