The effects of the growth interruption time on the optical and title struct
ural properties have been investigated. The high indium content InxGa1-xN/G
aN (x > 0.25) multi quantum wells used in this study were grown on c-plane
sapphire by using metalorganic chemical vapor deposition. The interruption
was carried out by closing tile group-III metal organic sources before and
after the growths of the InGaN quantum well layers. With increasing interru
ption time, the quantum dot like? region and well thickness decreased due t
o indium re-evaporation or the thermal etching: effect. As a result, the PL
peak position was blue-shifted, and the intensity was reduced. The sizes a
nd the number of V-defer:ts did not differ with the interruption time. The
interruption time was not directly related to the formation of defects. The
V-defects originate at threading dislocations and inversion domain boundar
ies due to higher misfit strain.