Growth and structure of aligned B-C-N nanotubes

Aligned B-C-N nanotubes were prepared by bias assisted hot filament chemica l vapor depositionfrom source gases of H-2, N-2, CH4, and B2H6. Various mor phologies were obtained at different growth conditions. The area density of the nanotubes increases with increasing discharge current. The nanotubes g row along the direction of the electrical field. Dense and highly oriented B-C-N nanotubes were obtained at 620 degreesC and high discharge current. T he growth temperature has effects on the tube diameter and the nanotubes gr own at higher temperature are thinner than that at lower temperature. The B concentration of the deposits increases with increasing the B2H6 concentra tion. in gas mixture and various B:C:N ratios of 10:81:9, 16:73:11, and 34: 42:24 were obtained at different gas composition. (C) 2001 American Vacuum Society.