Formation of metallic surface structures by ion etching using a S-layer template

Crystalline cell surface layers (S-layer) of the bacteria species Deinococc us Radiodurans are used as an anometric template for patterning thin ferrom agnetic films. A hexagonal pattern of uniform 10-nm-wide dots and a lattice ,constant of 18 nm is fabricated from 2.5-nm-thick sputter deposited Co, Fe Co, Fe, CoNi, and NiFe. Suitable parameters for the subsequent Ar ion etchi ng are elaborated. For successful patterning, the etching energy ranges fro m 50 to 300 eV and the etching time from 17 to 283 s at an ion current of 1 .5- 5.5 muA/cm(2). The formation of nanodot arrays is demonstrated by scann ing electron and scanning force microscopy. (C) 2001 American Vacuum Societ y.