Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

A new technique for the preparation of site specific plan-view specimens us ing a focused ion beam system is presented. The technique consists of milli ng a wedge shaped piece of material which is free from the substrate, lifti ng this out using a micromanipulator and needle, and orientating it on the substrate with the original surface vertical. The plan-view specimen is the n milled from this piece of material using an approach based on the "lift-o ut" technique for the preparation of a cross-section specimen. Advantages o f this technique over current methods based on the "lift-out" and the "tren ch" techniques are that the plan-view specimens are site specific, the surr ounding substrate is left intact, and numerous plan-view specimens can be p repared in close proximity to one another. (C) 2001 American Vacuum Society .