Effect of the Ti-underlayer microstructure on the texture of Al thin films

Citation
S. Yoo et al., Effect of the Ti-underlayer microstructure on the texture of Al thin films, J VAC SCI B, 19(3), 2001, pp. 856-858
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
19
Issue
3
Year of publication
2001
Pages
856 - 858
Database
ISI
SICI code
1071-1023(200105/06)19:3<856:EOTTMO>2.0.ZU;2-V