Papers from the 13th International Vacuum Microelectronics Conference - 13-17 August 2000 Guangzhou, China - Preface

Authors
Xu, NS
Citation
Ns. Xu, Papers from the 13th International Vacuum Microelectronics Conference - 13-17 August 2000 Guangzhou, China - Preface, J VAC SCI B, 19(3), 2001, pp. 861-861
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
19
Issue
3
Year of publication
2001
Pages
861 - 861
Database
ISI
SICI code
1071-1023(200105/06)19:3<861:PFT1IV>2.0.ZU;2-5