A. Wisitsora-at et al., Diamond emitter arrays with uniform self-aligned gate built from silicon-on-insulator wafer, J VAC SCI B, 19(3), 2001, pp. 971-974
A;self-aligned gate fabrication technique utilizing silicon-on-insulator te
chnology is developed for the fabrication of large uniform arrays of diamon
d field emitters with self-aligned gate and sharp tip cathode. A uniform ar
ray with millions of gated diamond microemitters was reproducibly achieved.
The diamond field emitter array, tested in triode configuration with an ex
ternal anode, has a low turn-on gate voltage of 26 V. A high emission curre
nt of 1 muA per tip was obtained at a gate voltage of approximately 60 V an
d an anode voltage of 200 V. The ability to modulate emission current at lo
w gate voltage allows more practical usage of a diamond field emitter in va
cuum microelectronics. (C) 2001 American Vacuum Society.