Field emission current cleaning and annealing of microfabricated cold cathodes

Authors
Schwoebel, PR Spindt, CA Holland, CE Panitz, JA
Citation
Pr. Schwoebel et al., Field emission current cleaning and annealing of microfabricated cold cathodes, J VAC SCI B, 19(3), 2001, pp. 980-987
Citations number
23
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
19
Issue
3
Year of publication
2001
Pages
980 - 987
Database
ISI
SICI code
1071-1023(200105/06)19:3<980:FECCAA>2.0.ZU;2-U
Abstract
Thermal cleaning and annealing by the extracted field emission current has been used to achieve and maintain stable emission characteristics with micr ofabricated cold field emission cathodes. Our studies show that the cathode tip surface can be smoothed, recrystallized, and at least partially cleane d of surface adsorbates. The result is a significant decrease in emission c urrent noise and recovery of the initial current-voltage characteristics of the cathode following surface contamination. (C) 2001 American Vacuum Soci ety.