Simulation of planar deflection systems for field emission devices

Planar electron optical systems, with emphasis on planar deflectors, were i nvestigated by computer simulation in three dimensions (3D). The simulation s were carried out using a computer program based on the surface charge den sity method, with a coordinate system to assist meshing of boundary element s. Simulation of electron trajectories in 3D offers the possibility to see the final spot on an anode plane, helping to optimize the electron optical design. Three types of planar deflectors, split ring, microstrip, and horiz ontal bars were investigated to demonstrate their capability of deflecting electrons from a field emitter or a field emitter array. Some applications for these planar deflection systems have been suggested. Simple to fabricat e and easy to be integrated with a field emitter are the biggest advantages for these planar electron optical systems. With the assistance of computer simulation, a better performance from these planar systems can also be ach ieved. (C) 2001 American Vacuum Society.