Zinc oxide (ZnO) luminescent thin films have been prepared on ITO-glass sub
strates by pulsed laser deposition with a KrF excimer laser. We investigate
d the luminance of the ZnO films depending on laser fluence and the effects
of postannealing. We have tested the crystallinity of the samples by x-ray
diffraction and analyzed the growth mechanism to explain high-quality ZnO
luminescent thin-film preparation by adjusting laser fluence and postanneal
ing treatment. (C) 2001 American Vacuum Society.