Preparation of graded-morphology diamond thin films

Authors
Einaga, Y Kim, GS Ohnishi, K Park, SG Fujishima, A
Citation
Y. Einaga et al., Preparation of graded-morphology diamond thin films, MAT SCI E B, 83(1-3), 2001, pp. 19-23
Citations number
18
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
ISSN journal
09215107 → ACNP
Volume
83
Issue
1-3
Year of publication
2001
Pages
19 - 23
Database
ISI
SICI code
0921-5107(20010621)83:1-3<19:POGDTF>2.0.ZU;2-S
Abstract
Graded-morphology diamond thin films were prepared in a single experimental run using a simple technique during the chemical vapor deposition (CVD) pr ocess: one end of the substrate was elevated. We showed that the substrate temperature had a profound effect on the morphology and grain size of the a s-deposited lightly boron-doped diamond films. We have discussed the morpho logical dependence of electrochemical properties as one example of the exce llent Function of the graded film. (C) 2001 Elsevier Science B.V. All right s reserved.