Local lifetime control by light ion irradiation: impact on blocking capability of power P-i-N diode

Citation
P. Hazdra et al., Local lifetime control by light ion irradiation: impact on blocking capability of power P-i-N diode, MICROELEC J, 32(5-6), 2001, pp. 449-456
Citations number
23
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONICS JOURNAL
ISSN journal
00262692 → ACNP
Volume
32
Issue
5-6
Year of publication
2001
Pages
449 - 456
Database
ISI
SICI code
0026-2692(200105/06)32:5-6<449:LLCBLI>2.0.ZU;2-2
Abstract
The impact of local lifetime control by H-1(+) and He-4(2+) irradiation on blocking characteristics of power P-i-N diodes was studied in the dose rang e up to 5 x 10(12) Cm-2. Energies and doses for both types of projectiles w ere chosen in a way to create a comparable damage in three qualitatively di fferent regions close to the anode junction. Blocking capabilities of irrad iated diodes were measured, compared and simulated. The results show that t here is no difference between hydrogen and helium irradiation if the damage is located inside the anode area. When the damage peak is placed into the N-base side of the anode junction and the dose of protons exceeds 10(12) cm (-2), blocking capability of the diode drastically decreases while it stays at the same level for analogous irradiation by helium ions. (C) 2001 Publi shed by Elsevier Science Ltd. All rights reserved.