Direct light-triggered thyristors with integrated protection functions were
fabricated and investigated. It is shown that the simultaneous integration
of the light-trigger function and a reliable overvoltage self-protection c
an be achieved by integrating a diode into the centre of the thyristor. In
addition, a dV/dt self-protection function can be integrated by a proper ad
justment of the dV/dt capability of the amplifying gates and the main catho
de area, ensuring a safe turn-on of the thyristor when a voltage pulse with
a dV/dt value exceeding the maximum dV/dt value is applied to the device.
Thyristors with different breakdown voltages ranging from 5 to 8 kV on 2-,
4- and 5-inch wafers have been realised. (C) 2001 Published by Elsevier Sci
ence Ltd. All rights reserved.