On the behaviour of enhanced mixing in metal/ceramic interfaces

Different ceramic substrates (MgO, Al2O3, SiO2, SiC) were covered by thin m etallic films (Fe, Cu, Ni, Ti, Zr) using an MBE system. Ion beam mixing exp eriments were performed with 150 keV Ar-ions in the temperature range betwe en 77 and 673 K and by fluences between 1 x 10(16) and 8 x 10(16) ions/cm(2 ). Quantitative concentration depth profiles were obtained using Rutherford backscattering spectrometry (RBS). Surface topology was studied by high re solution scanning electron microscopy (HRSEM) and atomic force microscopy ( AFM). Fluence and temperature dependent surface roughening were concerned a nd subtracted prior to determine the intermixing in the samples. The possib le formation of new phases was investigated using X-ray diffraction (XRD) a nd conversion electron Moessbauer spectroscopy (CEMS). Three different tran sport processes, i.e. pure ballistic mixing (BM), chemical guided diffusion and radiation enhanced diffusion (RED), were separated using the different temperature behaviours, (C) 2901 Elsevier Science B.V. All rights reserved .