Nv. Vostokov et al., The relation between composition and sizes of GeSi/Si(001) islands grown at different temperatures, PHYS LOW-D, 3-4, 2001, pp. 295-301
The effect of alloying on growth and parameters of GeSi self-assembled isla
nds has been investigated by atomic force microscopy, Raman scattering and
X-ray analysis. A decrease of the islands sizes with reduction of growth te
mperature is associated with an increase of Ge content in the islands. Enha
ncement of alloying and coarsening of islands grown at 750 degreesC causes
a spread of the island size distribution. A transition of the islands shape
from dome to pyramid has been observed directly during Ge deposition at th
is temperature.