Preparation of carbon nanotubes and nanoparticles by microwave plasma-enhanced chemical vapor deposition

Systematic preparation of carbon nanotubes (CNTs) and nanoparticles (CNPs) on Fe (or Co; Ni)/gamma -Al2O3 by microwave plasma-enhanced chemical vapor deposition (MW-PECVD) has been reported with a mixture of CH4, H-2, and Ar as precursors. By regulating the preparation parameters; Various carbon nan ostructures including several novel CNTs have be obtained. The outstanding feature of this new approach is the low synthesis temperature (< 520 degree sC) due to the non-equilibrium characteristic of microwave plasma; Which is crucial for some practical applications. The experimental results also ind icate the potentiality and feasibility For scaled-up production of CNTs and CNPs at low cost; And the posibility to control the morphologies and struc tures of the carbon products with MW-PECVD. (C) 2001 Acta Materialia Inc. P ublished by Elsevier Science Ltd. All rights reserved.