ULSI interconnect formation using dispersed nanoparticles

Authors
Iwashige, H Kutulk, G Hayashi, S Suzuki, T Yoshida, T Abe, T Oda, M
Citation
H. Iwashige et al., ULSI interconnect formation using dispersed nanoparticles, SCR MATER, 44(8-9), 2001, pp. 1667-1670
Citations number
2
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
SCRIPTA MATERIALIA
ISSN journal
13596462 → ACNP
Volume
44
Issue
8-9
Year of publication
2001
Pages
1667 - 1670
Database
ISI
SICI code
1359-6462(20010518)44:8-9<1667:UIFUDN>2.0.ZU;2-G