Reflection electron microscopy observation of formation process of palladium silicide islands on silicon (111) surface

Authors
Takeguchi, M Tanaka, M Yasuda, H Furuya, K
Citation
M. Takeguchi et al., Reflection electron microscopy observation of formation process of palladium silicide islands on silicon (111) surface, SCR MATER, 44(8-9), 2001, pp. 2363-2367
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
SCRIPTA MATERIALIA
ISSN journal
13596462 → ACNP
Volume
44
Issue
8-9
Year of publication
2001
Pages
2363 - 2367
Database
ISI
SICI code
1359-6462(20010518)44:8-9<2363:REMOOF>2.0.ZU;2-M