Characterization and optical investigation of BCN film deposited by RF magnetron sputtering

The amorphous boron-carbon-nitrogen (BCN) films were deposited by RF magnet ron sputtering from a mixed target composed of h-BN and graphite. The growt h temperature ranged from 250 to 550 degreesC. This deposition temperature was shown to have significant effect on the composition and elemental bindi ng states of the BCN films, i.e. the films with higher fraction of sp(3) bi ndings of boron, carbon and nitrogen were obtained at higher deposition tem peratures. The refractive index of the BCN films deposited under the above conditions were in the range of 2.1-2.4, and their optical bandgaps ranged from 1.48-2.00 eV. The amorphous B25C40N35, films which were deposited at 5 50 degreesC, possessed superior optical properties. (C) 2001 Elsevier Scien ce B.V. All rights reserved.