Concentration limits for the measurement of boron by electron energy-loss spectroscopy and electron-spectroscopic imaging

Authors
Zhu, Y Egerton, RF Malac, M
Citation
Y. Zhu et al., Concentration limits for the measurement of boron by electron energy-loss spectroscopy and electron-spectroscopic imaging, ULTRAMICROS, 87(3), 2001, pp. 135-145
Citations number
14
Categorie Soggetti
Multidisciplinary,"Spectroscopy /Instrumentation/Analytical Sciences
Journal title
ULTRAMICROSCOPY
ISSN journal
03043991 → ACNP
Volume
87
Issue
3
Year of publication
2001
Pages
135 - 145
Database
ISI
SICI code
0304-3991(200104)87:3<135:CLFTMO>2.0.ZU;2-V
Abstract
We have shown that energy-loss spectroscopy in a medium-voltage transmissio n electron microscope can measure concentrations of boron tin a carbon matr ix) down to 0.2 %, with 10% accuracy. The detection limit is determined by electron-beam shot-noise statistics and by gain variations in the photodiod e or charge-coupled-diode array. (C) 2001 Elsevier Science B.V. All rights reserved.