Calculation of RF plasma torch parameters by means of non-equilibrium model, of AR plasma

Calculation of RF plasma torch parameters was made by means of non-equilibr ium model of plasma. In this study it was calculated RF ICP plasma torch by frequency 28 MHz, power 2 - 4 kW, inner diameter of the torch 24 mm, plasm a gas - argon. Plasma torch has three axial gas flows: sheath gas G(1)=20 1 /min, plasma gas G(2)=2.4 1/min, transport gas G(3)=3.4 1/min. Calculation has been performed within the frame of the method of control volume. The results show that the injection of transport gas in the axis plasma zon e leads to a strong disturbance of a thermal equilibrium and a cooling of t he axis zone.