The atomic structure of SiC(000 (1) over bar)C surface of the 6H polyt
ype has been studied in UHV by scanning tunnelling microscopy, low ene
rgy electron diffraction and Auger electron spectroscopy. A number of
different reconstructions could be reproducibly prepared in UHV by a c
ombination of annealing a sample with and without silicon flux al temp
eratures in the range 450-1400 degrees C. One of them has been identif
ied as SiC(000 (1) over bar)3 x 3 structure. A geometrical model of th
is reconstruction has been proposed. In accordance with that. the unit
cell consists of tell atoms bonding to produce six dimers and three a
datoms. The six- and nine-atom rings surround unoccupied sites of the
outermost carbon atoms of the SiC substrate. Each unit cell contains f
ive dangling bonds. three of which are associated with adatoms and are
responsible for protrusions in filled-state scanning tunnelling micro
scopy images. The other two are associated with carbon atoms of the su
bstrate. Furthermore, islands with an unreconstructed SiC(000 (1) over
bar)1 x I surface prepared in UHV have been observed with atomic reso
lution for the first time by means of STM. (C) 1997 Elsevier Science B
.V.