As a quantity characterizing the fluctuation of steps on vicinal surface, w
e study the step-position distribution function. This function gives the di
stribution of the position deviation of a step from the position equidistan
t from the two neighboring steps. On the basis of the harmonically-interact
ing step picture for vicinal surface, the relation between the step-positio
n distribution function and the surface stiffness is obtained. The relation
is verified by a Monte Carlo simulation for the free-Fermion terrace-step-
kink (TSK) model and the solid-on-solid step TSK model. (C) 2001 Elsevier S
cience B.V. All rights reserved.