Improved phosphorus injection synthesis for bulk InP

High purity, stoichiometric InP is being produced in crucible-shaped, 3-kg charges by the phosphorus injection method in a high-pressure magnetic liqu id encapsulated Czochralski (MLEC) crystal growth system. Dedicated heaters in the phosphorus injector assembly are used to heat and controllably inje ct the phosphorus vapor into the liquid encapsulated indium melt. Glow disc harge mass spectroscopy and van der Pauw measurements of the polycrystallin e charges and the Czochralski wafers confirmed the low background levels of impurities. (C) 2001 Elsevier Science B.V. All rights reserved.