Antireflective and protective films preparation on ZnS dome

Antireflective and protective films consisted of GexC1-x films were prepare d by reactive radio frequency magnetron sputtering (RRFS) on ZnS dome. A co mputer was used to simulate the thickness distribution of the film of ZnS d ome for different movement tracks, and the best one was got by using the be st dome movement track. The thickness uniformity of films could meet the ap plication requirement when films were deposited by RRFS on the dome. The co mputer control system was built according to the simulation results, and an tireflective and protective films consisted of GexC1-x films were deposited on the ZnS dummy dome. The results show that 1) the variation of thickness is lower than 10%, 2) the average transmittance, in the 8 similar to 11. 5 mum waveband, is raised from 69.6% to above 87.2% after the films are coat ed on double sides, 3) the average transmittance variation is less than 1.2 %. Thus the requirements of ZnS dome in infrared application are met.