OPTICAL DETERMINATION OF THE THICKNESS OF THIN-FILMS SYMMETRICALLY DEPOSITED ON BOTH SIDES OF THE SUBSTRATES

The optical transmission spectra of ceria thin films symmetrically dep osited on both sides of the glass slide substrate were modelled to det ermine the film thickness. Removal of absorption phenomenon of the sub strate from the experimental spectra allowed direct examination of cer ia thin-firm optical characteristics. This technique is applicable to weakly absorbing thin films, especially to those with typical thicknes s smaller than 100 nm, which is difficult to determine by scanning ele ctron microscopy.