Fabrication of ATLAS pixel detector prototypes at IRST

Authors
Boscardin, M Dalla Betta, GF Gregori, P Zen, M Zorzi, N
Citation
M. Boscardin et al., Fabrication of ATLAS pixel detector prototypes at IRST, NUCL INST A, 465(1), 2001, pp. 83-87
Citations number
5
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN journal
01689002 → ACNP
Volume
465
Issue
1
Year of publication
2001
Pages
83 - 87
Database
ISI
SICI code
0168-9002(20010601)465:1<83:FOAPDP>2.0.ZU;2-K
Abstract
We report on the development of a fabrication technology for n-on-n silicon pixel detectors oriented to the ATLAS experiment at LHC. The main processi ng issues and some selected results from the electrical characterization of detector prototypes and related test structures are presented and discusse d. (C) 2001 Elsevier Science B.V. All rights reserved.