Heavy ion irradiation induced effects in Ni3N/Al bilayers

The article reports on the Xe ion beam irradiation studies of Ni3N/Al bilay ers at 80 K. The ion-induced modifications were monitored by Rutherford bac kscattering (RBS), resonant nuclear reaction analysis (RNRA), X-ray diffrac tion (XRD) and atomic force microscopy (AFM). We found preferential loss of nitrogen from the surface region of the Ni3N top layers. The surface rough ness Delta (sigmas) and the interface broadening variance Delta sigma (2)(i nt), increase linearly with the Xe ion fluence Phi. The experimental mixing rate of Delta sigma (2)/Phi = 1.8 nm(4) is explained by considering an enh ancement of ballistic mixing due to chemical reactions at the interface. (C ) 2001 Elsevier Science B.V. All rights reserved.