Depth resolution of a laser profilometer based on photo-EMF detector

A laser profilometer based on adaptive photo-EMF detector that can find app lication for testing optically rough surfaces is described. Depth resolutio n of the configuration is shown to depend on not only the coherence length of the wide-spectrum light source used, but also the interelectrode spacing of the detector and crossing angle of interfering beams. Experimental demo nstration of the device having an approximately 10 mum resolution and using a GaAs photo-EMF detector and a superluminescent diode was performed in te sts of multisurface reflecting object.