Ultra-thin bi-axially textured IBAD MgO template layers resolved by grazing incidence X-ray diffraction

We describe a method using grazing incidence diffractometry (GID) with a ro tating anode X-ray source to measure the in-plane alignment of similar to 1 0-nm thick MgO films deposited by ion beam assisted deposition (IBAD). In c onjunction with these measurements, we have calibrated the IBAD film growth process by monitoring the film in situ with reflected high-energy electron diffraction and comparing the intensity versus time curve with results obt ained from the ex situ GID measurements. GID has also been used to identify differences in the observed in-plane texture for samples with and without the addition of a homoepitaxial layer. Improvements in texture after the ad dition of the homoepitaxial layer are attributed to the healing of ion indu ced damage during growth of the IBAD layer. Further analysis has revealed t hat standard X-ray diffraction measurements of these overcoated films do no t sufficiently quantify the in-plane alignment of the initial IBAD layers, (C) 2001 Elsevier Science B.V. All rights reserved.