Reflection high-energy electron diffraction oscillations during epitaxial growth of artificially layered films of (BaCuOx)(m)/(CaCuO2)(n)

Pulsed laser deposition in molecular-beam epitaxy environment has been used to grow high quality BaCuOx/CaCuO2 superlattices. In situ reflection high energy electron diffraction (RHEED) shows that the growth mechanism is two- dimensional. Furthermore, weak but reproducible RHEED intensity oscillation s have been monitored during the growth. Ex situ X-ray diffraction spectra confirmed the growth rate deduced from RHEED oscillations. Such results dem onstrate that RHEED oscillations can be used, even for (BaCuOx)(2)/(CaCuO2) (2) superlattices. for phase locking of the growth. (C) 2001 Elsevier Scien ce B.V. All rights reserved.